Low Pressure Thermal CVD Synthesis of Tungesten Nitride Thin Film and its Growth Behavior.
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چکیده
منابع مشابه
Phonon thermal conductivity of scandium nitride for thermoelectrics from first-principles calculations and thin-film growth
Sit Kerdsongpanya,1,* Olle Hellman,1,2 Bo Sun,3 Yee Kan Koh,3 Jun Lu,1 Ngo Van Nong,4 Sergei I. Simak,1 Björn Alling,1,5 and Per Eklund1,† 1Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden 2Department of Applied Physics and Materials Science, California Institute of Technology, Pasadena, California 91125, USA 3Department of Mechanical Engine...
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ژورنال
عنوان ژورنال: NIPPON KAGAKU KAISHI
سال: 1994
ISSN: 2185-0925,0369-4577
DOI: 10.1246/nikkashi.1994.907